Master thesis - Shallow Trench Isolation Planarization for 180nm CMOS Technology (m/f/d)

Sense the power of light

The ams OSRAM Group is a global leader in innovative light and sensor solutions. With more than 110 years of industry experience, we combine engineering excellence and global manufacturing with a passion for cutting-edge innovation enabling transformative advancements in the automotive, industrial, medical, and consumer industries. “Sense the power of light” – our success is based on the deep understanding of the potential of light and distinct portfolio of emitter and sensor technologies. Around 19,700 employees worldwide drive innovations alongside societal megatrends.
Find out more about us on https://ams-osram.com

The CSA division supplies sensors that bridge the gap between the world we live in and the digital world of machines. By converting physical signals - heartbeats, sounds, light waves - into data, we enable robots, cars and other devices to interact with people and improve our world. What drives CSA is a relentless desire to contribute to technology and have a meaningful impact on the world. This business thrives on solving complex problems and partnering with global leaders at the forefront of technological advancement. Our goal: to push the boundaries of sensor technology and empower innovators to make the world smarter, healthier and happier.

Your New Responsibilities

• •    Literature Review:
• o    Comparative analysis of colloidal SiO₂, fumed SiO₂, and CeO₂ slurries for STI-CMP including cross-contamination risk mitigation concept for CeO2 slurries
• o    Investigation of STI-CMP defectivity, with emphasis on microscratch formation and stress-induced defects
• •    Experimental Work and Analysis:
• o    Characterization of slurry PSD and zeta potential.
• o    CMP processing of blank wafers and patterned short-loop wafers to generate defect and inline thickness data
• o    Drive and organization of ceria slurry demonstration with supplier
• o    Evaluation of defect and thickness data to identify correlations with slurry properties and CMP settings

Who we are looking for

• Ongoing Master’s studies in Materials Science, Chemistry, Chemical Engineering, Physics, or related fields
• Basic knowledge of CMP processes is an advantage
• Independent, structured, and analytical working style
• Proficiency in English (written and spoken)

The employment is in accordance with the collective salary and wage agreement for employees of the electrical and electronics industry, employment group E (https://www.feei.at/aktuelles/mindestloehne-und-gehaelter-eei/).

Please contact Marlies Nigitz for further information via marlies.nigitz@ams-osram.com or +43 (3136) 50032853.